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MSD22

Material Safety Data Sheets (MSDS) – Page 22

Sputtering Target Formula CAS Number Available Purities MSDS File
Indium Gallium Oxide In2O3:Ga2O3=98:2wt 64815-01-6 99.99%
Calcium Zirconate CaZrO3 12013-47-7 99.90%
Barium Niobate BaNbO3 12009-14-2 99.99%
Calcium Ruthenate CaRuO3 99.90%