CAS Number: 1309-48-4
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Columns, Step Targets, Custom Designs
Stanford Advanced Materials (SAM) supplies high-purity Magnesium Oxide (MgO) sputtering targets, which are specially designed for demanding thin-film applications. Being a very important dielectric and buffer layer material, MgO targets of our company are essential to magnetic tunnel junctions (MTJs), RRAM devices, and high-performance optical films. They exhibit exceptional electrical insulation, high spin polarization (~85%), and thermal stability at high temperatures, and are hence superior to others like Al₂O₃ in demanding applications.
High Purity Magnesium Oxide Sputtering Target for Thin-film Coating
| Material | Magnesium Oxide (MgO) |
| Appearance | Solid |
| Density | 3.58 g/cm³ |
| Melting Point | 2,852 °C |
| Transparency Range | 0.3 to 7 µm |
| Purity | 99.9%, 99.95%, 99.99% |
| Standard Diameters | 1.0″ to 6.0″ |
| Standard Thickness | 0.125″, 0.250″ |
| Sputtering Method | RF Sputtering |
| Bonding Recommendation | Elastomer Bonding |
Handling Note: MgO is brittle and has low thermal conductivity. We strongly recommend using mechanical clamping or our elastomer bonding service to prevent thermal shock and fracturing during use.
Magnesium oxide sputtering targets are used in a wide range of thin-film applications where insulating, transparent, or thermally resistant layers are required:
Semiconductor Devices
Gate dielectrics, barrier layers, and insulating films in transistor structures
Optical Coatings
Anti-reflective layers, UV filters, and dielectric mirrors for high-precision optics
Magnetic Storage Media
Protective and insulating layers in hard disk and magnetic recording devices
Electronics & Displays
Thin insulating coatings in LCDs, OLEDs, and other flat panel devices
Superconductors & Buffer Layers
Used as a stable substrate or buffer layer for YBCO and other epitaxial thin films
Due to MgO’s mechanical fragility, elastomer bonding is recommended for most applications. This flexible interface helps reduce stress transfer and cracking. SAM also offers:
Custom bonding configurations
Machined backing plates (e.g., Mo, CuCrZr)
Mechanical clamping assistance if bonding is not used
All of our MgO targets are vacuum-sealed and protected with anti-static foam to prevent contamination and mechanical damage in transit. Full traceability and stock control are ensured by clear labeling.
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Our company recently ordered this 99.95% pure MgO sputtering target for use in our Optical Coatings project. The target offered a transparency range of 0.3 to 7 µm which met our project requirements. The available sizes and options made it easy to choose the right specifications. A top-notch product indeed.
I bought 3 pieces 2.00″ Dia. x 0.125″ Thick MgO sputter target for my lab. They worked well for my sputtering experiment.