| Sputtering Target | Formula | CAS Number | Available Purities | MSDS File |
|---|---|---|---|---|
| Dysprosium Fluoride | DyF3 | 13569-80-7 | 99.9%, 99.95%, 99.99% |  |
| Erbium Fluoride | ErF3 | 13760-83-3 | 99.9%, 99.95% | |
| Gadolinium Fluoride | GdF3 | 13765-26-9 | 99.9% | |
| Hafnium Fluoride | HfF4 | 13709-52-9 | 99.9% | |
| Lithium Fluoride | LiF | 7789-24-4 | 99.9%, 99.95%, 99.99% | |
| Lanthanum Fluoride | LaF3 | 13709-38-1 | 99.9%, 99.95%, 99.99% | |
| Magnesium Fluoride | MgF2 | 7783-40-6 | 99.9%, 99.95%, 99.99% | |
| Manganese Fluoride | MnF2 | 7782-64-1 | 99.9% | |
| Samarium Fluoride | SmF3 | 13765-24-7 | 99.9%, 99.95% | |
| Sodium Aluminum Fluoride | Na5Al3F14 | 13775-53-6 | 99.9%, 99.95% | |
| Sodium Fluoride | NaF | 7681-49-4 | 99.9% | |
| Strontium Fluoride | SrF2 | 7783-48-4 | 99.9% | |
| Terbium Fluoride | TbF3 | 13708-63-9 | 99.9% | |
| Thorium Fluoride | ThF4 | 13709-59-6 | 99.9%, 99.95%, 99.99% | |
| Tin Fluoride | SnF2 | 7783-47-3 | 99.9% | |
| Titanium Fluoride | TiF3 | 13470-08-1 | 99.9% | |