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MSDS15

Material Safety Data Sheets (MSDS) – Page 15

Sputtering Target Formula CAS Number Available Purities MSDS File
Iron Carbide Fe3C 12011-67-5 99.9%
Niobium Carbide NbC 12069-94-2 >99.5%
Molybdenum Carbide Mo2C 12069-89-5 99.5%
Silicon Carbide SiC 409-21-2 99.5%
Tantalum Carbide TaC 12070-06-3 99.5%
Titanium Carbide TiC 12070-08-5 99.5%
Tungsten Carbide WC 12070-12-1 99.5%, 99.9%
Vanadium Carbide VC 12070-10-9 99.5%
Zirconium Carbide ZrC 12070-14-3 99.5%
Aluminum Fluoride AlF3 7784-18-1 99.9%, 99.95%, 99.99%
Barium Fluoride BaF2 7787-32-8 99.9%, 99.95%, 99.99%
Cadmium Fuoride CdF2 7790-79-6 99.9%, 99.95%, 99.99%
Calcium Fluoride CaF2 7789-75-5 99.9%, 99.95%, 99.99%
Cesium Fluoride CsF 13400-13-0 99.9%, 99.95%, 99.99%
Cerium Fluoride CeF3 7758-88-5 99.9%, 99.95%, 99.99%
Chromium Fluoride CrF3 7788-97-8 99.9%