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MSD14

Material Safety Data Sheets (MSDS) – Page 14

Sputtering Target Formula CAS Number Available Purities MSDS File
Aluminum Nitride AlN 24304-00-5 99.5%, 99.9%
Chromium Nitride Cr2N 12053-27-9 99.5%, 99.9%
Boron Nitride BN 10043-11-5 >99.5%
Germanium Nitride Ge3N4 12065-36-0 99.9%
Iron Nitride FeN4 37245-77-5 99.9%
Hafnium Nitride HfN 25817-87-2 >99.5%
Niobium Nitride NbN 24621-21-4 >99.5%
Silicon Nitride Si3N4 12033-89-5 99.5%, 99.9%
Titanium Nitride TiN 25583-20-4 99.5%
Tantalum Nitride TaN 12033-62-4 >99.5%
Vanadium Nitride VN 24646-85-3 99.5%
Zinc Nitride Zn3N2 1313-49-1 99.9%
Zirconium Nitride ZrN 25658-42-8 99.5%
Boron Carbide B4C 12069-32-8 99.5%
Chromium Carbide Cr3C2 12012-35-0 99.5%
Hafnium Carbide HfC 12069-85-1 >99.5%