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(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0185 Silicon Dioxide (SiO2) Sputtering Target

Chemical Formula: SiO2
Catalog Number: ST0185
CAS Number: 7631-86-9
Purity: 99.9%, 99.95%, 99.99%, 99.995%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Silicon Oxide Safety Data Sheet



Description of Silicon Dioxide Sputtering Target



Silicon dioxide (SiO2), also known as Silica, is a natural compound made from two of the most abundant materials on the planet: silicon (Si) and oxygen (O2). Silica is most commonly considered to be in the form of quartz. It exists naturally in water, plants, animals and the earth. 59% of the earth’s crust is composed of silicon dioxide. In addition, it also forms more than 95% of the known rocks on Earth. Here is the sructure of SiO2.

silicon dioxide chemical structure
silicon dioxide chemical structure

Specification of Silicon Dioxide Sputtering Target

Material Type Silicon (IV) Oxide
Symbol SiO2
Color/Appearance White, Crystalline Solid
Melting Point (°C) 1,610
Boiling Point (°C) 2,230
Density (kg/m-3) 2,533
Sputter RF
Type of Bond Indium, Elastomer
Comments Quartz excellent in E-beam.
Available Sizes Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please send us an inquiry for more information.

Target Bonding of Silicon Dioxide Sputtering Target

Indium Bonding and Elastomeric Target Bonding Service are available for silicon dioxide sputtering target. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.

Target Bonding Services


Our silicon oxide sputtering target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

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Please send us an inquiry for current pricing on sputtering targets and other deposition materials not listed.

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Silicon Dioxide (SiO2) Sputtering Target
Average rating:  
 1 reviews
by Geek Family on Silicon Dioxide (SiO2) Sputtering Target
For experiment project

I needed sputtering targets for a experiment project, and these little guys did not disappoint me. Satisfied with SAM's products.