(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0129 Aluminum Oxide Sputtering Target, Al2O3

Chemical Formula: Al2O3
Catalog Number: ST0129
CAS Number: 1344-28-1
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Aluminum oxide sputtering target is available in various forms, purities, sizes, and prices in Stanford Advanced Materials. SAM has two decades’ experience in supplying alumina sputtering targets to fulfill most of your requirements.

Aluminum Oxide Sputter Target Safety Data Sheet



Aluminum Oxide Sputtering Target Description

AluminumOxygenAluminum oxide sputtering target from Stanford Advanced Materials contains Al and O, and it has the same properties as aluminum oxide. Aluminum oxide, or Al2O3, is the most commonly occurring of several aluminum oxides, and specifically identified as aluminum (III) oxide. The aluminum oxide sputter target is commonly called alumina sputter target, and may also be called aloxide target, aloxite target, or alundum target, depending on particular forms or applications. Al2O3 occurs naturally in its crystalline polymorphic phase α-Al2O3 as the mineral corundum, varieties of which form the precious gemstones ruby and sapphire.

Aluminum Oxide Sputtering Target Specification

Chemical Compound Aluminum Oxide
Symbol Al2O3
Color/Appearance White, Crystalline Solid
Melting Point 2,072 °C
Theoretical Density 3.97 g/cc
Z Ratio 0.336
Sputter RF-R
Type of Bond Indium
Available Sizes Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

Aluminum Oxide Sputtering Target Application

Aluminum oxide sputtering target is used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc. The major uses of specialty aluminum oxides are in refractories, ceramics, polishing and abrasive applications. Large tonnages of aluminum hydroxide, from which alumina is derived, are used in the manufacture of zeolites, coating titania pigments, and as a fire retardant/smoke suppressant.

Aluminum Oxide Sputtering Target Bonding Methods

Alumina sputter targets can be bonded by Indium Bonding. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.

Target Bonding Services


Aluminum oxide sputtering targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

Get Contact

High purity Al2O3 sputtering targets are available in various forms, purities, sizes, and prices. We specialize in producing high purity thin film coating materials with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Please send us an inquiry for current pricing on sputtering targets and other deposition materials not listed.

Submit your review

Create your own review

Aluminum Oxide (Al2O3) Sputtering Target
Average rating:  
 1 reviews
by Paul McNamara on Aluminum Oxide (Al2O3) Sputtering Target

Product delivered just as requested and easy to put together. Will buy again. Great customer service.