| Sputtering Target | Formula | CAS Number | Available Purities | MSDS File |
|---|---|---|---|---|
| Ytterbium Fluoride | YbF3 | 13760-80-0 | 99.9%, 99.95%, 99.99% |  |
| Zinc Fluoride | ZnF2 | 7783-49-5 | 99.9%, 99.95%, 99.99% | |
| Yttrium Fluoride | YF3 | 13709-49-4 | 99.9%, 99.95%, 99.99% | |
| Zirconium Fluoride | ZrF4 | 7783-64-4 | 99.9% | |
| Chromium Silicide | CrSi2 | 12018-09-6 | >99.5% | |
| Hafnium Silicide | HfSi2 | 12401-56-8 | >99.5% | |
| Iron Silicide | FeSi2 | 12022-99-0 | 99.9%, 99.95%, 99.99% | |
| Magnesium Silicide | Mg2Si | 22831-39-6 | 99.9% | |
| Molybdenum Silicide | MoSi2 | 12136-78-6 | >99.5% | |
| Niobium Silicide | NbSi2 | 12060-34-3 | 99.5% | |
| Nickel Silicide | NiSi2 | 12201-89-7 | 99.9% | |
| Tantalum Silicide | TaSi2 | 12039-79-1 | 99.5% | |
| Titanium Silicide | TiSi2 | 12039-83-7 | >99.5% | |
| Tungsten Silicide | WSi2 | 12039-88-2 | 99.5% | |
| Zirconium Silicide | ZrSi2 | 12039-90-6 | 99.9% | |
| Antimony Sulfide | Sb2S3 | 1345-04-6 | 99.9%, 99.95%, 99.99% | |