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MSD17

Material Safety Data Sheets (MSDS) – Page 17

Sputtering Target Formula CAS Number Available Purities MSDS File
Ytterbium Fluoride YbF3 13760-80-0 99.9%, 99.95%, 99.99%
Zinc Fluoride ZnF2 7783-49-5 99.9%, 99.95%, 99.99%
Yttrium Fluoride YF3 13709-49-4 99.9%, 99.95%, 99.99%
Zirconium Fluoride ZrF4 7783-64-4 99.9%
Chromium Silicide CrSi2 12018-09-6 >99.5%
Hafnium Silicide HfSi2 12401-56-8 >99.5%
Iron Silicide FeSi2 12022-99-0 99.9%, 99.95%, 99.99%
Magnesium Silicide Mg2Si 22831-39-6 99.9%
Molybdenum Silicide MoSi2 12136-78-6 >99.5%
Niobium Silicide NbSi2 12060-34-3 99.5%
Nickel Silicide NiSi2 12201-89-7 99.9%
Tantalum Silicide TaSi2 12039-79-1 99.5%
Titanium Silicide TiSi2 12039-83-7 >99.5%
Tungsten Silicide WSi2 12039-88-2 99.5%
Zirconium Silicide ZrSi2 12039-90-6 99.9%
Antimony Sulfide Sb2S3 1345-04-6 99.9%, 99.95%, 99.99%