Purity:99.9%, 99.95%, 99.99%
Shape:Discs, Plates, Column Targets, Step Targets, Custom-made
Indium Bonding and Elastomeric Target Bonding Service are available for Yttrium Oxide (Y2O3) Sputtering Target. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.
|Material Type||Yttrium Oxide|
|Color/Appearance||White, Crystalline Solid|
|Melting Point (°C)||2,410|
|Type of Bond||Indium, Elastomer|
|Comments||Loses oxygen; films smooth and clear.|
Yttrium is a chemical element originated from Ytterby, Sweden. It was first mentioned in 1794 and observed by J. Gadolin. The isolation was later accomplished and announced by G. Mosander. “Y” is the canonical chemical symbol of yttrium. Its atomic number in the periodic table of elements is 39 with location at Period 5 and Group 3, belonging to the d-block. The relative atomic mass of yttrium is 88.90585(2) Dalton, the number in the brackets indicating the uncertainty.
Oxygen is a chemical element originated from the Greek ‘oxy’ and ‘genes’ meaning acid-forming. It was first mentioned in 1771 and observed by W. Scheele. The isolation was later accomplished and announced by W. Scheele. “O” is the canonical chemical symbol of oxygen. Its atomic number in the periodic table of elements is 8 with location at Period 2 and Group 16, belonging to the p-block. The relative atomic mass of oxygen is 15.9994(3) Dalton, the number in the brackets indicating the uncertainty.
Our Yttrium Oxide (Y2O3) Sputtering Target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.
SAM specializes in producing high purity Yttrium Oxide (Y2O3) Sputtering Target with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications.