Catalog No. | VD0806 |
---|---|
Material | Tantalum Silicide (TaSi2) |
Purity | 99.5% |
Shape | Powder/ Granule/ Custom-made |
The evaporation materials include pure metals and alloys, oxides ceramics including rare earth oxides, such as Sc2O3, Y2O3, La2O3 and other ceramics, such as fluorides, nitrides etc. Various shapes, such as tablets, granules, rods and wires are available. Customized forms and quantity are also available upon request. SAM also provides evaporation sources, boats, filaments, crucibles and heaters, and e-beam crucible liners.
The materials are used in deposition processes including semiconductor deposition, chemical vapor deposition (CVD) and physical vapor deposition (PVD)and mainly for optics including wear protection, decorative coatings, and displays.
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Arrived as stated. Are just what I need to use with my sputtering machine.