|Material||Tantalum Nitride (TaN)|
|Shape||Powder/ Granule/ Custom-made|
SAM specializes in producing up to 99.999% high purity evaporation materials using quality assurance processes to guarantee product reliability. The materials are used in deposition processes including semiconductor deposition, chemical vapor deposition (CVD) and physical vapor deposition (PVD)and mainly for optics including wear protection, decorative coatings, and displays.
The evaporation materials include pure metals and alloys, oxides ceramics including rare earth oxides, such as Sc2O3, Y2O3, La2O3 and other ceramics, such as fluorides, nitrides etc. Various shapes, such as tablets, granules, rods and wires are available.