Oxide ceramic sputtering targets represent the cornerstone of modern thin film technology, combining exceptional material properties with versatile application capabilities. At Stanford Advanced Materials (SAM), we specialize in manufacturing high-purity oxide ceramic targets that meet the demanding requirements of contemporary engineering and research applications.
Superior Thermal Performance
– High melting points (typically >2000°C)
– Excellent thermal stability in oxidative environments
– Maintain structural integrity at elevated temperatures
Exceptional Electrical Properties
– Outstanding electrical insulation characteristics
– Controlled dielectric properties for electronic applications
– Consistent performance across temperature ranges
Enhanced Mechanical Properties
– Superior hardness and wear resistance
– Excellent corrosion resistance against acids and alkalis
– Long operational lifespan in demanding conditions
Single Oxide Ceramics
– Aluminum Oxide (Al₂O₃): Exceptional electrical insulation, high hardness
– Magnesium Oxide (MgO): High temperature stability, good thermal conductivity
– Beryllium Oxide (BeO): Excellent thermal conductivity, electrical insulation
– Titanium Oxide (TiO₂): Photocatalytic properties, refractive index control
Complex Oxide Ceramics
– Indium Tin Oxide (ITO): Transparent conductive oxide for displays
– Yttrium Stabilized Zirconia (YSZ): Enhanced thermal barrier coatings
– Barium Strontium Titanate (BST): Tunable dielectric properties
Purity: 99.9% – 99.999% (custom purity available)
Density: ≥95% theoretical density
Grain Size: Fine, uniform microstructure
Dimensions: Standard and custom sizes available
Binding: Indium, elastomer, or epoxy bonding options
We understand that every application has unique requirements. Our customization services include:
• Tailored target dimensions and shapes
• Specific purity and density requirements
• Custom material compositions and dopants
• Specialized surface finishes and bonding options
Ready to Enhance Your Thin Film Processes?
Contact our technical team today!
