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Rotatory sputter target technology has been widely used in the area of architectural glass and flat panel displays coating manufacturing. The standard manufacturing methods are plasma spraying onto the base tubes, casting and extrusion of the complete assembly.

Rotatable Targets

Comparing with planar targets, rotatory target contains more material and offers a greater utilization, which means longer production runs and reduced downtime of the system, increases the throughput of the coating equipment. Besides, rotary sputter target allows the use of higher power densities due to the heat build-up being spread evenly over the surface area of the target. As a consequence, an increased deposition speed can be seen along with an improved performance during reactive sputtering.

Stanford Advanced Materials provides the custom-made cylindrical magnetron sputtering targets, mainly Cr, Ag, Al, Si, Sn, Ti, Stainless steel, TiO2, W, Ta, Mo, Nb, Cu and other metal and alloy materials.

Sprayed: SAM provides thermally sprayed rotary targets providing optimal process stability and performance, including plasma, arc and cold spray production method. The main materials are AZO, ITO, Mo, Si, TiOx, ZnO, and ZTO.

Cast: Main advantages are high compositional and microstructural consistency and purity control, which contribute to high process yield and long target life. Products include InSn, Sn alloys, ZnAl and ZnSn materials.

Extruded: SAM is an established supplier of high-purity extruded Al, Cu, Mo, Nb, Ta, Ti, Zr, V and other materials with good purity and grain size.

HIP/Sintered: HIP products include Cr, Mo, ITO, AZO and ZnO sputtering targets.

Material Planar Rotatable
Aluminium Al
Bismuth Bi
Chromium Cr
Copper Cu
Indium In
Molybdenum Mo
Niobium Nb
Silicon Si
Tin Sn
Titanium Ti
Tungsten W
Zirconium ZrCopper-Aluminium Cu-Al
Indium-Tin In-Sn
Niobium-Zirconium Nb-Zr
Nickel-Chromium Ni-Cr
Silicon-Aluminium Si-Al
Stainless Steel
Zinc-Aluminium Zn-Al
Zinc-Tin Zn-Sn
Indium Tin Oxide
ITO 90-10 wt%
Niobium oxide NbOx
Titanium oxide TiOx
Zinc oxide-Aluminium oxide
ZnO-Al2O3
Zinc oxide ZnO
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