(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0197 Titanium Dioxide Sputtering Target, TiO2

Chemical Formula: TiO2
Catalog Number: ST0197
CAS Number: 13463-67-7
Purity: >99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Titanium dioxide sputtering target is available in various forms, purities, sizes, and prices. Stanford Advanced Materials (SAM) provides a wide range of film coating materials with competitive price and great delivery time.

Titanium Dioxide Sputtering Target Safety Data Sheet



Titanium Dioxide Sputtering Target Description

titanium dioxide structure
TiO2 Sputtering Target Structure

Titanium dioxide sputtering target from Stanford Advanced Materials contains Ti and O. Titanium dioxide, also known as titanium(IV) oxide or titania, is the naturally occurring oxide of titanium, chemical formula TiO2. Titanium dioxide occurs in nature as the minerals rutile and anatase, and additionally as two high pressure forms. One of these is a monoclinic baddeleyite-like form known as akaogiite, and the other is an orthorhombic α-PbO2-like form known as brookite, both of which can be found at the Ries crater in Bavaria. It is mainly sourced from ilmenite ore. This is the most widespread form of titanium dioxide-bearing ore around the world. Rutile is the next most abundant and contains around 98% titanium dioxide in the ore. The metastable anatase and brookite phases convert irreversibly to the equilibrium rutile phase upon heating above temperatures in the range 600–800 °C (1,112–1,472 °F).

Titanium Dioxide Sputtering Target Specification

Material Type Titanium (IV) Oxide
Symbol TiO2
Color/Appearance White-Beige, Gray-Black
Theoretical Density  4.23 g/cc
Melting Point 1,830 °C
Sputter RF, RF-R
Type of Bond Indium, Elastomer
Comments Suboxide, must be reoxidized to rutile. Ta reduces TiO2 to TiO and Ti.
Available Sizes Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please send us an inquiry for more information.

Titanium Dioxide Sputtering Target Application

  • Thin Film Coating:  Titanium oxide TiO2 sputtering target is used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc.
  • Paints and Coatings: Titanium dioxide provides opacity and durability, while helping to ensure the longevity of the paint and protection of the painted surface. Titanium dioxide is well-known for having a very high refractive index, and this has led to its common use in thin-film optics.TiO2 sputtering target is used for thin film deposition
  • Plastics, Adhesives and Rubber: Titanium dioxide can help minimize the brittleness, fading and cracking that can occur in plastics and other materials as a result of light exposure.
  • Cosmetics: Pigment-grade titanium dioxide is used in some cosmetics to aid in hiding blemishes and brightening the skin. Titanium dioxide allows for the use of thinner coatings of make-up material for the same desired effect. When used as a pigment, it is called titanium white, Pigment White 6 (PW6), or CI 77891.
  • Paper: Titanium dioxide is used to coat paper, making it whiter, brighter and more opaque.
  • Food Contact Materials and Ingredients: The opacity to visible and ultraviolet light offered by titanium dioxide protects food, beverages, supplements and pharmaceuticals from premature degradation, enhancing the longevity of the product. Specific classes of high purity pigment-grade titanium dioxide are also used in drug tablets, capsule coatings and as a decorative aid in some foods.

Titanium Dioxide TiO2 Sputtering Target Bonding Services

Indium Bonding and Elastomeric Target Bonding Service are available for titanium dioxide sputtering target. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.

Target Bonding Services

Titanium Dioxide TiO2 Sputtering Target Packaging

Our titanium oxide sputter targets are carefully handled to prevent damage during storage and transportation and to preserve the quality of our products in their original condition.

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Titanium dioxide sputtering targets are good magnetron sputtering materials. They are available in various forms, purities, sizes, and prices. We specialize in producing high purity thin film coating materials with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Please send us an inquiry for current pricing on sputtering targets and other deposition materials not listed.

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Titanium Dioxide (TiO2) Sputtering Target
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by Rob Vance on Titanium Dioxide (TiO2) Sputtering Target

My children used them for science experiment, worked exactly how they were suppodse to.