|Material||Titanium Oxide (Ti2O3)|
|Shape||Powder/ Granule/ Custom-made|
The evaporation materials include pure metals and alloys, oxides ceramics including rare earth oxides, such as Sc2O3, Y2O3, La2O3 and other ceramics, such as fluorides, nitrides etc. Various shapes, such as tablets, granules, rods and wires are available. Customized forms and quantity are also available upon request. SAM also provides evaporation sources, boats, filaments, crucibles and heaters, and e-beam crucible liners.
High purity evaporation materials play important role in deposition processes to ensure high quality deposited film.