Material Type: Titanium (IV) Oxide
Color/Appearance: White-Beige, Gray-Black
Melting Point (°C): 1,830
Theoretical Density (g/cc): 4.23
Z Ratio: 0.4
Thermal Evaporation Techniques: Boat: W, Mo
E-Beam Crucible Liner Material: Fabmate®, Tantalum
Temp. (°C) for Given Vap. Press. (Torr) : 10-4: ~1,300
Comments: Suboxide, must be reoxidized to rutile. Ta reduces TiO2 to TiO and Ti.
Purity: 99.9% ~ 99.99%
Shape: Powder/ Granule/ Custom-made
The evaporation materials include pure metals and alloys, oxides ceramics including rare earth oxides, such as Sc2O3, Y2O3, La2O3 and other ceramics, such as fluorides, nitrides etc. Various shapes, such as tablets, granules, rods and wires are available. Customized forms and quantity are also available upon request. SAM also provides evaporation sources, boats, filaments, crucibles and heaters, and e-beam crucible liners.
The materials are used in deposition processes including semiconductor deposition, chemical vapor deposition (CVD) and physical vapor deposition (PVD)and mainly for optics including wear protection, decorative coatings, and displays.
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Good quality and doesn't break with a light crash.