Chemical Formula: Ti
Catalog Number: ST0053
CAS Number: 7440-32-6
Purity: 99.2%-99.7%, 99.97%-99.98%, >99.99%, 99.995%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made
Stanford Advanced Materials (SAM) provides high-purity titanium sputtering targets for thin-film deposition use in semiconductors, optics, displays, glass coatings, and decorative. Our Ti targets are manufactured to ensure uniform film formation, high density, and consistent sputtering performance.
Titanium Sputtering Target Safety Data Sheet
| Parameter | Details |
|---|---|
| Material | Titanium (Ti) |
| Purity | 99.2%-99.7%, 99.97%-99.98%, >99.99%, 99.995% |
| Color / Appearance | Silvery Metallic |
| Melting Point | 1,660 °C |
| Theoretical Density | 4.5 g/cm³ |
| Sputtering Method | DC |
| Available Shapes | Discs, Plates, Column Targets, Step Targets, Custom |
| Bonding | Elastomer, Indium |
| Thickness | 0.125″ – 0.25″ |
| Diameter | 1″ – 6″ |
SAM provides both standard and custom titanium targets:
| Purity | Diameter | Thickness | Bonding | Availability |
|---|---|---|---|---|
| 99.99% | 2″–6″ | 0.125″–0.25″ | Elastomer | Stock |
| 99.995% | Custom sizes | On request | Indium | Lead time: 2–3 weeks |
Quick Inquiry: Customers can submit specifications for a quote tailored to their requirements.
Titanium sputtering targets are used in applications where strength, corrosion resistance, and biocompatibility are needed:
Q1: What purity is optimal for semiconductor-grade coatings?
A1: 99.99%–99.995% is optimal for low-contamination and high-performance thin films.
Q2: How does the bonding type affect titanium sputtering?
A2: Elastomer bonding works generally; indium bonding improves thermal management for high-power sputtering.
Q3: Does SAM produce custom shapes or small-batch targets?
A3: Yes, we manufacture custom sizes, thicknesses, and bonding for specialty deposition systems.
Q4: Where should titanium targets be stored?
A4: Cool, dry location. Vacuum packaging to prevent oxidation.
Contact us today for pricing, lead time, and custom titanium sputtering targets.
Submit your review | |
We ordered titanium sputtering targets from SAM for our semiconductor R&D line, and the quality has been excellent. The targets have very high density and purity, which translates directly to uniform and consistent thin-film coatings. Bonding was done with indium, and thermal management has been smooth even under extended high-power sputtering runs.
High-purity titanium targets, excellent film quality, and professional packaging. Great experience with SAM!
So far it's been really awesome and I highly recommend it.
Five stars. Shipping was fairly quick. Product was exactly as expected.
