Chemical Formula: Si3N4
Catalog Number: ST0215
CAS Number: 12033-89-5
Purity: 99.5%, 99.9%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made
Silicon Nitride Safety Data Sheet
Silicon Nitride is a high-melting-point ceramic material that is extremely hard and relatively chemically inert. The material is prepared by heating powdered silicon between 1300 °C and 1400 °C in an atmosphere of nitrogen. Then the powder of silicon nitride can be sintered to the designed shape.
Related Product: Nitride Ceramic Sputtering Target
| Material Type | Silicon Nitride |
| Symbol | Si3N4 |
| Color/Appearance | White to Gray or Dark Gray to Black, Crystalline Solid |
| Melting Point | 1,900 °C |
| Density | 2.2 to 3.5 g/cm3 |
| Sputter | RF, RF-R |
| Type of Bond | Indium, Elastomer |
| Available Sizes | Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″ Thick: 0.125″, 0.250″ |
As it is one of the most thermodynamically stable technical ceramic material with high hardness as well, silicon nitride ceramic is ideal for bearing parts, especially for those required to work at high speed and high temperature. Si3N4 bearing balls have already been applied in automobiles, rockets high-speed engines, equipment working in a corrosive environment and some performance model cars. Compared with steel, high-performance ceramic balls have better mechanical properties under high temperature and could survive from most of the corrosive chemicals. Silicon nitride has also been used in high-temperature applications, such as rocket engines. It was considered as one of the few monolithic ceramic materials that could survive the severe thermal shock and thermal gradients generated in hydrogen-oxygen rocket engines. Silicon nitride sputtering targets can be used in thin film deposition.
Indium bonding and Elastomer bonding are available for the silicon nitride sputtering targets. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.
Our silicon nitride sputter targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.
Please send us an inquiry for current pricing on sputtering targets and other deposition materials not listed.
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These Si3N4 targets are really nice. They're made from very good raw materials. They are really well-made.
These target sizes are well-tailored and perfectly fit my coater.
