Chemical Formula: Zn3N2
Catalog Number: ST0219
CAS Number: 1313-49-1
Purity: 99.9%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made
Stanford Advanced Materials (SAM) offers high-purity zinc nitride (Zn₃N₂) sputtering targets for use in advanced thin-film deposition systems. Zinc nitride is a semiconducting, n-type nitride compound that is gaining attention for its optical, electronic, and environmentally friendly properties, especially as a potential alternative to traditional transparent conductive oxides (TCOs).
Our Zn₃N₂ targets are manufactured with high density and fine grain size to ensure stable sputtering rates, minimal particle generation, and uniform film quality.
High Purity Zinc Nitride for Thin-film Application
| Symbol | Zn₃N₂ |
|---|---|
| Appearance | Gray solid |
| Purity | 99.9% |
| Density | 6.2 g/cm³ |
| Melting Point | ~700 °C (decomposes) |
| Sputtering Method | RF or reactive DC sputtering |
| Available Sizes | Dia. 2″–6″, Thickness: 0.125″–0.25″ |
| Bonding Options | Elastomer bonding recommended |
| Custom Options | Available on request |
Note: Zn₃N₂ decomposes at elevated temperatures—process with caution and under controlled atmosphere.
Zinc nitride sputtering targets are ideal for RF or reactive sputtering of thin films in:
Optoelectronic Devices
Thin film transistors (TFTs), photodetectors, and sensor layers
Semiconductors
Wide-bandgap compound for n-type channels and buffer layers
Display Technologies
Transparent conductive films and backplane components for LCDs and OLEDs
Photovoltaics
Window layers and buffer coatings in solar cells
Glass Coatings
Functional coatings for anti-reflection, IR shielding, or architectural glass
Optical Storage & Data Layers
Layer materials in optical data media with low optical loss
Due to its moderate thermal stability and ceramic-like behavior, elastomer bonding is recommended for zinc nitride targets to reduce thermal shock and mechanical stress.
Backing plates (copper, stainless steel, molybdenum) are available to match your system specifications.
Each target is vacuum-sealed and cushioned to prevent damage during transit. Labels and documentation include full material traceability. SAM applies stringent quality controls to ensure high purity, phase stability, and consistent microstructure.
High-quality zinc nitride sputtering target is available in various forms, purities, sizes, and prices. We specialize in producing high-purity thin film coating materials with the highest possible density and smallest possible average grain sizes. Please send us an inquiry for the current prices of the sputtering targets and other deposition materials that are not listed.
