(949) 407-8904 Mon - Fri 08:00 - 17:00 1940 East Deere Avenue, Suite 100, Santa Ana, CA 92705, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 1940 East Deere Avenue, Suite 100, Santa Ana, CA 92705, USA

ST0219 Zinc Nitride Sputtering Target, Zn3N2

Chemical Formula: Zn3N2
Catalog Number: ST0219
CAS Number: 1313-49-1
Purity: 99.9%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Stanford Advanced Materials (SAM) offers high-purity zinc nitride (Zn₃N₂) sputtering targets for use in advanced thin-film deposition systems. Zinc nitride is a semiconducting, n-type nitride compound that is gaining attention for its optical, electronic, and environmentally friendly properties, especially as a potential alternative to traditional transparent conductive oxides (TCOs).

Our Zn₃N₂ targets are manufactured with high density and fine grain size to ensure stable sputtering rates, minimal particle generation, and uniform film quality.

Zinc Nitride MSDS File




Description

High Purity Zinc Nitride for Thin-film Application

Zinc Nitride Sputtering Target Specification

Symbol Zn₃N₂
Appearance Gray solid
Purity 99.9%
Density 6.2 g/cm³
Melting Point ~700 °C (decomposes)
Sputtering Method RF or reactive DC sputtering
Available Sizes Dia. 2″–6″, Thickness: 0.125″–0.25″
Bonding Options Elastomer bonding recommended
Custom Options Available on request

Note: Zn₃N₂ decomposes at elevated temperatures—process with caution and under controlled atmosphere.

Zinc Nitride Sputtering Target Application

Zinc nitride sputtering targets are ideal for RF or reactive sputtering of thin films in:

  • Optoelectronic Devices
    Thin film transistors (TFTs), photodetectors, and sensor layers

  • Semiconductors
    Wide-bandgap compound for n-type channels and buffer layers

  • Display Technologies
    Transparent conductive films and backplane components for LCDs and OLEDs

  • Photovoltaics
    Window layers and buffer coatings in solar cells

  • Glass Coatings
    Functional coatings for anti-reflection, IR shielding, or architectural glass

  • Optical Storage & Data Layers
    Layer materials in optical data media with low optical loss

Bonding Services

Due to its moderate thermal stability and ceramic-like behavior, elastomer bonding is recommended for zinc nitride targets to reduce thermal shock and mechanical stress.

Backing plates (copper, stainless steel, molybdenum) are available to match your system specifications.

View Bonding Services →

Packaging & Quality Assurance

Each target is vacuum-sealed and cushioned to prevent damage during transit. Labels and documentation include full material traceability. SAM applies stringent quality controls to ensure high purity, phase stability, and consistent microstructure.

Get Contact

High-quality zinc nitride sputtering target is available in various forms, purities, sizes, and prices. We specialize in producing high-purity thin film coating materials with the highest possible density and smallest possible average grain sizes. Please send us an inquiry for the current prices of the sputtering targets and other deposition materials that are not listed.