Material Type: Aluminum Oxide
Symbol: Al2O3
Color/Appearance: White, Crystalline Solid
Melting Point (°C): 2,072
Theoretical Density (g/cc): 3.97
Z Ratio: 0.336
E-Beam: Excellent
E-Beam Crucible Liner Material: Fabmate®, Tungsten
Temp. (°C) for Given Vap. Press. (Torr): 10-4: 1,550
Comments: Sapphire excellent in E-beam; forms smooth, hard films. Thermal evaporation likely not possible.
Aluminum Oxide is generally white or clear in appearance with a melting point of 2,072°C, a vapor pressure of 10-4 Torr at 1,550°C, and a density of 3.97 g/cc. It is most commonly found in nature as the mineral corundum, from which ruby and sapphire are derived. Aluminum oxide is used extensively as an abrasive and is utilized in various industrial applications. It can also be found in paint, cosmetics, and surgical implants.
High purity evaporation materials play important role in deposition processes to ensure high quality deposited film. SAM specializes in producing up to 99.999% high purity evaporation materials using quality assurance processes to guarantee product reliability.
The evaporation materials include pure metals and alloys, oxides ceramics including rare earth oxides, such as Sc2O3, Y2O3, La2O3 and other ceramics, such as fluorides, nitrides etc. Various shapes, such as tablets, granules, rods and wires are available. Customized forms and quantity are also available upon request. SAM also provides evaporation sources, boats, filaments, crucibles and heaters, and e-beam crucible liners.
