Chemical Formula: ZrO2
Catalog Number: ST0206
CAS Number: 1314-23-4
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made
Zirconium dioxide (ZrO2), sometimes known as zirconia, is a white crystalline oxide of zirconium. Its most naturally occurring form, with a monoclinic crystalline structure, is the mineral baddeleyite. A dopant stabilized cubic structured zirconia, cubic zirconia, is synthesized in various colors for use as a gemstone and a diamond simulant.
Three phases are known: monoclinic below 1170 °C, tetragonal between 1170 °C and 2370 °C, and cubic above 2370 °C. The trend is for higher symmetry at higher temperatures, as is usually the case. A small percentage of the oxides of calcium or yttrium stabilize in the cubic phase. The very rare mineral tazheranite, (Zr, Ti, Ca)O2, is cubic. Unlike TiO2, which features six-coordinated titanium in all phases, monoclinic zirconia consists of seven-coordinated zirconium centers. This difference is attributed to the larger size of the zirconium atom relative to the titanium atom.
|Material Type||Zirconium Oxide|
|Melting Point (°C)||~2,700|
|heoretical Density (g/cc)||5.89|
|Type of Bond||Indium, Elastomer|
|Comments||Films oxygen deficient, clear and hard.|
The main use of zirconia is in the production of hard ceramics, such as in dentistry (see below), with other uses including as a protective coating on particles of titanium dioxide pigments, as a refractory material, in insulation, abrasives and enamels. Stabilized zirconia is used in oxygen sensors and fuel cell membranes because it has the ability to allow oxygen ions to move freely through the crystal structure at high temperatures. This high ionic conductivity (and a low electronic conductivity) makes it one of the most useful electroceramics. Zirconium dioxide is also used as the solid electrolyte in electrochromic devices. Zirconia is a precursor to the electroceramic lead zirconate titanate (PZT), which is a high-K dielectric, which is found in myriad components.
Indium Bonding and Elastomeric Target Bonding Service are available for Zirconium Oxide (ZrO2) Sputtering Target. Stanford Advanced Materials is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services. For questions about target bonding materials, methods and services, please click here.
Our Zirconium Oxide Sputtering Target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.
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