Common targets and corresponding color
1. Golden Color Series
Ti series:
Ti TiN
Ti+Au TiN+Au
Ti+Zr TiZrN
Other:
Zr ZrN
Zr+Au ZrN+Au
Hf HfN
2.Black Color Series
Ti series:
Ti TiCN
Ti (C, O)
TiAl TiAlN
Ti50Al50 black
Ti30Al70 dark
TiAl (C, O, N)
Other:
Si SixNy
CrAl CrAlC
SUS SUSC
DLC
Nb NbOx
The Ti-Al alloy target is usually used as a functional film. When it is used as decoration, there are several problems:
- the film itself has high internal stress, so it has poor adhesion to the three dimensional surface of the workpiece.
- The proportion of Ti and Al in the target is difficult to be realized in the production of the target material, which is expected to be in the circle. The equipment of the target is realized by adjusting the sputtering power ratio between the two targets of Ti and Al in the vacuum chamber, and greatly reducing the cost of the target.
3.Blue Color Series
Interference Color:
Ti, Cr, Zr, Al, In
Other:
TiAl TiAlN
SUS SUSN
4.Rare elements boride and its color:
ZrB2 silver grey
ZrB12 silver grey
ZrBN silver grey
LaB6 deep violet
CeB6 blue
SmB6 blue
YB6 silver grey
5.Rare element carbides and their colors:
BeC red
MnC black
NbC light tea color
TaC all brown
LaN black
HfN yellowish brown
WN Brown
MnN black
The production of target materials and their compounds is the most widely used in Ti, Cr, Ni and other targets, and then into nitrogen and acetylene to form some colors. Therefore, the process adjustment is the most convenient way for the development of the sputter target color.
PVD couplet:
The color of the film formed by the interaction of grain boundaries, or the interaction of free electrons and photons, is strongly dependent on the chemical composition and grain structure of the film.
The microstructure of the film is highly disordered and the grain is nanoscale, and some micro defects, such as holes, interstitial atoms, and impurities, lead to their electronic properties, and the corresponding optical properties are different from those of the bulk materials.
Color stability of PVD targets film (as an example of ZrN)
The longer the exposure time of the coated products in the air is, the more serious the oxidation is, especially for the smaller proportion of metal elements in the coating.
Stanford Advanced Materials (SAM) Corporation is a global sputtering target manufacturer established in 1994. For more information, please visit https://www.sputtertargets.net/.
