(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

VD0572 Ruthenium (Ru) Evaporation Materials

Material Type: Ruthenium
Symbol: Ru
Atomic Weight: 101.07
Atomic Number: 44
Color/Appearance: Silvery White Metallic
Thermal Conductivity: 120 W/m.K
Melting Point (°C): 2,310
Coefficient of Thermal Expansion: 6.4 x 10-6/K
Theoretical Density (g/cc): 12.3
Z Ratio: 0.182
E-Beam: Poor
Temp. (°C) for Given Vap. Press. (Torr) : 10-8: 1,780
10-6: 1,990
10-4: 2,260
Purity: 99.9% ~ 99.95%
Shape: Powder/ Granule/ Custom-made

Stanford Advanced Materials (SAM) is a leading manufacturer and supplier of high purity Ruthenium Evaporation Materials and a wide variety of evaporation materials. We offer our evaporation materials in powder and granule form. Customized forms are also available upon request.


High purity evaporation materials play a huge role in deposition processes to ensure high quality deposited film. Stanford Advanced Materials (SAM) specializes in producing up to 99.95% purity ruthenium evaporation materials using quality assurance processes to guarantee product reliability.

ruthenium evaporation materials

• Used in deposition processes including semiconductor deposition, chemical vapor deposition (CVD) and physical vapor deposition (PVD)
• Used for optics including wear protection, decorative coatings, and displays.

Our evaporation materials are carefully handled to prevent damage during storage and transportation and to preserve the quality of our products in their original condition.

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Ruthenium (Ru) Evaporation Materials
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