(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0493 Cobalt Tantalum Zirconium (Co/Ta/Zr) Sputtering Target

Chemical Formula: Co/Ta/Zr
Catalog Number: ST0493
Purity: 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made


Description of Cobalt Tantalum Zirconium Sputtering Target


Cobalt is a chemical element originated from the German word ‘kobald’, meaning goblin. It was first mentioned in 1732 and observed by G. Brandt. “Co” is the canonical chemical symbol of cobalt. One of its most popular uses is as a blue pigment found in paint, jewelry, and glass. It is often alloyed with other metals to make engine parts and cutting tools. Its two main vacuum applications are as a ferromagnetic layer in the production of magnetic storage media and as a transitional layer in battery fabrication.

Tantalum is a rare, hard, blue-gray, lustrous transition metal that is highly corrosion-resistant. It is part of the refractory metals group, which are widely used as minor components in alloys. The chemical inertness of tantalum makes it a valuable substance for laboratory equipment and a substitute for platinum. Tantalum sputtering target is used in integrated circuits and Thin Film Transistor Liquid Crystal Display (TFT-LCD).

ZirconiumZirconium is a lustrous, grey-white, strong transition metal that closely resembles hafnium and, to a lesser extent, titanium. Zirconium is mainly used as a refractory and opacifier, although small amounts are used as an alloying agent for its strong resistance to corrosion. Zirconium forms a variety of inorganic and organometallic compounds such as zirconium dioxide and zirconocene dichloride, respectively. Five isotopes occur naturally, three of which are stable. Zirconium compounds have no known biological role.

Related Products: Cobalt sputtering targetTantalum sputtering targetZirconium sputtering target.

Specifications of Cobalt Tantalum Zirconium Sputtering Target

Material Type Cobalt Tantalum Zirconium
Symbol Co/Ta/Zr
Color/Appearance Metallic solid in various forms – sputtering target, bars, sheets, rods
Melting Point /
Density /
Available Sizes Dia.: 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please send us an inquiry for more information.


Our Cobalt Tantalum Zirconium sputtering targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

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SAM’s Cobalt Tantalum Zirconium sputter targets are available in various forms, purities, sizes, and prices. We specialize in producing high purity physical vapor deposition (PVD) materials with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Get an inquiry right now.

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Cobalt Tantalum Zirconium (Co/Ta/Zr) Sputtering Target
Average rating:  
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by John Blue on Cobalt Tantalum Zirconium (Co/Ta/Zr) Sputtering Target

Quality product, work well. Five stars