(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0514 Hafnium Oxide with Calcium Oxide Sputtering Target, HfO2/CaO

Chemical Formula: HfO2/CaO
Catalog Number: ST0514
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

SAM’s Hafnium Oxide with Calcium Oxide Sputter Targets are available in various forms, purities, sizes, and prices. We specialize in producing high-purity physical vapor deposition (PVD) materials with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD), and physical vapor deposition (PVD) display and optical applications.


Hafnium Oxide with Calcium Oxide Sputtering Target Description


Hafnium is a lustrous, silvery gray, tetravalent transition metal, hafnium chemically resembles zirconium and is found in many zirconium minerals. Its existence was predicted by Dmitri Mendeleev in 1869, though it was not identified until 1923, by Coster and Hevesy, making it the last stable element to be discovered. Hafnium is named after Hafnia, the Latin name for Copenhagen, where it was discovered.

CalciumCalcium is a chemical element that originated from the Latin ‘calx’ meaning lime. It was first mentioned in 1808 and observed by H. Davy. The isolation was later accomplished and announced by H. Davy. “Ca” is the canonical chemical symbol of calcium. Its atomic number in the periodic table of elements is 20 with location at Period 4 and Group 2, belonging to the s-block. The relative atomic mass of calcium is 40.078(4) Dalton, the number in the brackets indicating the uncertainty.

Related Product: Hafnium Sputtering TargetCalcium Sputtering Target.

Hafnium Oxide with Calcium Oxide Sputtering Target Specifications

Material Type Hafnium Oxide with Calcium Oxide
Symbol HfO2/CaO
Color/Appearance Solid
Melting Point /
Density /
Available Sizes Dia.: 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

We also offer other customized shapes and sizes of the sputtering targets, please inquire for more information.

Hafnium Oxide with Calcium Oxide Sputtering Target Applications

  1. Semiconductor Devices: These sputtering targets are used in the semiconductor industry to deposit hafnium oxide films. These films serve as high-k dielectrics in advanced semiconductor devices, improving their performance and enabling further miniaturization.
  2. Memory Devices: Hafnium oxide films are crucial in the manufacturing of non-volatile memory devices, such as Ferroelectric Random-Access Memory (FeRAM) and Phase-Change Memory (PCM). They enhance data retention and reliability.
  3. Optical Coatings: Hafnium oxide is used in optical coatings, particularly in high-performance anti-reflective coatings for lenses, optical filters, and precision optics. These coatings reduce reflection and improve light transmission.
  4. Ferroelectric Materials: Hafnium oxide-based ferroelectric materials have applications in electronic components like capacitors and sensors due to their unique properties like high dielectric constant and ferroelectricity.
  5. Gas Sensors: Hafnium oxide-based films are used in gas sensors, contributing to the detection and monitoring of various gases in industrial and environmental settings.
  6. Energy Storage: In the field of energy storage, hafnium oxide films are being explored for use in supercapacitors and batteries, offering high energy density and charge storage capabilities.
  7. Thin-Film Transistors (TFTs): Hafnium oxide is employed in the fabrication of TFTs, which are essential components in flat-panel displays, including LCDs and OLEDs.
  8. Nanotechnology: Researchers use hafnium oxide films for various nanoscale applications, such as nanowire fabrication and the development of novel nanoelectronic devices.

Hafnium Oxide with Calcium Oxide Sputtering Target Packing

Our Hafnium Oxide with Calcium Oxide Sputtering Targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

Submit your review

Create your own review

Hafnium Oxide with Calcium Oxide Sputtering Target, HfO2/CaO
Average rating:  
 2 reviews
by JagH. on Hafnium Oxide with Calcium Oxide Sputtering Target, HfO2/CaO

A good purchase for me! This pack should last me a long time! Recommended!

by Fook Heng on Hafnium Oxide with Calcium Oxide Sputtering Target, HfO2/CaO

Price is good for me. The package is tight and the shipping is fast.