(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0983 Ruthenium Oxide Sputtering Target, RuO2

Chemical Formula RuO2
Catalog No. ST0983
CAS Number 12036-10-1
Purity 99.9%, 99.95%, 99.99%, 99.995%, 99.999%
Shape Discs, Plates, Column Targets, Step Targets, Custom-made

Stanford Advanced Materials (SAM) is dedicated to delivering Ruthenium Oxide Sputtering Targets with a strong emphasis on superior quality and cost-effectiveness. Our competitive pricing establishes these sputtering targets as the optimal choice for a diverse range of high-tech applications, guaranteeing clients unparalleled quality without compromising affordability.


Product Overview

Our high-purity Ruthenium Oxide Sputtering Targets, crafted from dark black RuO2, are essential for thin-film applications in electronics, optics, and energy storage. Known for its excellent electrical conductivity and stability under high temperatures, Ruthenium Oxide is ideal for demanding industrial applications.

Related Product: Ruthenium Sputtering Target


Chemical Formula  RuO2
CAS Number  12036-10-1
Purity  Options from 99.9% to 99.999%
Molecular Weight  133.07 g/mol
Appearance  Solid, dark black
Melting Point  1,200°C
Density  6.97 g/cm³
Sputter  RF, DC
Available Sizes Diameter up to 14 inches, Thickness ≥ 1 mm; custom sizes available upon request.

Key Properties and Applications


  • Conductivity: Ruthenium Oxide is known for its superb conductivity, making it suitable for electrode applications in various electronic devices.
  • High-Temperature Stability: Maintains performance under high temperatures, crucial for applications in high-temperature electronic devices.
  • Mechanical Strength: Offers excellent wear and corrosion resistance, enhancing the durability of coated components.


  1. Electronic devices: Ruthenium Oxide Sputtering Targets play a key role in the preparation of electronic devices and are used to form conductive films such as electrodes and conductive layers. This is critical for making high-performance semiconductor devices, capacitors and other electronic components.
  2. Optical coatings: Due to their superior optical properties, Ruthenium Oxide Sputtering Targets are widely used to prepare optical coatings, including anti-reflective coatings and mirror coatings. The application of these coatings in optical components improves the performance of optical devices.
  3. Energy Storage: In the energy field, Ruthenium Oxide Sputtering Targets play a key role in the preparation of high-performance batteries such as supercapacitors and lithium-ion batteries. Its electrical conductivity and thermal stability make it a preferred material, improving battery performance and life.
  4. Sensor technology: Ruthenium Oxide is also used in sensor technology, especially at high temperatures and harsh environmental conditions, where its stability and conductive properties make it an ideal sensor material.
  5. High-temperature electronic devices: Due to their good thermal stability, Ruthenium Oxide Sputtering Targets perform well in preparing high-temperature electronic devices, meeting the needs of some special environments.

Customization and Technical Support

We provide customized sizing and composition based on your specifications and offer comprehensive support including target bonding services. Options for Indium and Elastomer bonding are available to enhance the target’s integration into your specific setup.

Frequently Asked Questions

Q1: What makes Ruthenium Oxide a preferred material for sputtering targets?
A1: Its excellent conductivity, thermal stability, and mechanical strength make it ideal for high-performance applications in electronics and energy storage.

Q2: Can I get Ruthenium Oxide Targets in custom dimensions for my specific application?
A2: Absolutely, we can customize the dimensions and shapes to meet the specific needs of your deposition systems and applications.

Q3: What are common applications of Ruthenium Oxide Sputtering Targets?
A3: They are widely used for producing electronic components, optical coatings, and electrodes for energy storage devices.

Contact Us

For further details, to request a quote, or discuss your specific needs, please contact our customer service team. We are here to provide you with the right materials and technical solutions for your sputtering requirements.

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Ruthenium Oxide Sputtering Target, RuO2
Average rating:  
 1 reviews
by Jordan Ellis on Ruthenium Oxide Sputtering Target, RuO2

Just got my Ruthenium Oxide Sputtering Target from Stanford Advanced Materials and wow, I’m super pleased! It came perfectly packed—no scratches, no dents. I’ve used it for a bunch of runs now, and the consistency is just spot on. The films come out smooth and uniform every time, which is amazing for my electronics projects.

I really appreciate how pure the material is because it keeps my results clean and reliable, exactly what I need when I’m knee-deep in experiments. Plus, it wears down evenly so I’m not constantly adjusting settings.

The support team deserves a shoutout too. They were all kinds of helpful, answering my questions before I even bought the thing, and they sent all the specs and info I needed.

Totally satisfied with my purchase and I’ll definitely be sticking with SAM for my future material needs. Cheers to great products and great service!