(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA
(949) 407-8904 Mon - Fri 08:00 - 17:00 23661 Birtcher Dr., Lake Forest, California, USA

ST0516 Thorium Oxide Sputtering Target, ThO2

Chemical Formula: ThO2
Catalog Number: ST0516
CAS Number: 1314-20-1
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

SAM’s Thorium Trioxide Sputter Targets are available in various forms, purities, sizes, and prices. We specialize in producing high-purity physical vapor deposition (PVD) materials with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD), and physical vapor deposition (PVD) display and optical applications.


Thorium Oxide Sputtering Target Description


Thorium is a chemical element that originated from Thor, the Scandinavian god of thunder. It was first mentioned in 1829 and observed by J. Berzelius. “Th” is the canonical chemical symbol of thorium. Its atomic number in the periodic table of elements is 90 with location at Period 7 and Group 3, belonging to the f-block. The relative atomic mass of thorium is 232.03806(2) Dalton, the number in the brackets indicating the uncertainty.

Thorium Oxide Sputtering Target Specifications

Material Type Thorium Oxide (ThO2)
Symbol ThO2
Color/Appearance White, Crystalline Solid
Purity 99.9% min
Density 9.7 g/cm³
Available Sizes Diameter: 2.0″ to 16.0″
Thickness: 0.125″ to 1″
Shape Disc, Plate, Custom-made

We also offer other customized shapes and sizes of the sputtering targets, please inquire for more information.

Thorium Oxide Sputtering Target Applications

Thorium Oxide Sputtering Targets find application in a range of high-tech industries:

  1. Optical Coatings: Used in precision optical coatings due to its high refractive index and excellent light-transmitting properties.
  2. Thin-Film Electronics: Vital in the production of advanced thin-film transistors and integrated circuits.
  3. Research and Development: Ideal for scientific research in materials science and condensed matter physics.
  4. Semiconductor Fabrication: Crucial for depositing thin films in semiconductor device manufacturing.

Thorium Oxide Sputtering Target Packing

Our Thorium Oxide Sputtering Targets are clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

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Thorium Oxide Sputtering Target, ThO2
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by Camila West on Thorium Oxide Sputtering Target, ThO2

I got many sputter targets for our chemistry lab and we use them for sputter deposition experiments.