Electrically insulating targets must be sputtered RF. Electrically insulating films, however, can be made through DC/Pulsed DC reactive sputtering. The electrical conductivity of a sputtering target must be greater than 10-7 (ohm-cm)-1 in order to sputter via a DC power supply [1]. This is an experimentally derived quantity and not subject to much debate. 1. J. Szczyrbowski, G. Brauer, W. Dicken, M. Scherer, W. Maab, G. Teschner, and A. Zmelty, Surf. And Coating Technol., 93, 14 (1997)
